Probe preparation
Multi Beam System JEOL JIB-4501
Sample preparation for the electron tomography experiments
| Acceleration voltage | 1 to 30 kV (in 5 kV steps) |
| Electron source | LaB₆ |
| Ion source | Gallium liquid metal ion source |
| Resolution | 2.5 nm (at 30 kV) |
| Magnification | 5x to 300,000x |
| Sample current | Up to 60 nA (at 30 kV) |
| Moving aperture | 12 steps (motor drive) |
| Shapes of the ion beam when milling | Rectangle, line, dot and bitmap |
| Maximum sample size | approx. 30 x 50 x 4 mm³ (horizontal insertion) |
| Attachments | Gasine injection system for the deposition of carbon and tungsten |
